Materials Science of Thin Films: Deposition & Structure by Milton Ohring is a book that I read recently. I have a lot of trouble with this book, it contain a lot of think that you want to know about thin films, a lot of detail. Some of detail have made me headache.
It has twelve chapters: ‘A Review of Materials Science’, ‘Vacuum Science and Technology’, ‘Thin-Film Evaporation Processes’, ‘Discharges, Plasmas, and Ion-Surface Interactions’, ‘Plasma and Ion Beam Processing of Thin Films’, ‘Chemical Vapor Deposition’, ‘Substrate Surfaces and Thin-Film Nucleation’, ‘Epitaxy’, ‘Film Structure’, ‘Characterization of Thin Films and Surfaces’, ‘Interdiffusion, Reactions, and Transformations in Thin Films’, ‘Mechanical Properties of Thin Films’, respectively.
The most read chapter is ‘Substrate Surface and Thin-Film Nucleation’. I still have some stupid problem in my mind when I read this chapter. May be I should ask someone who can answer me.
